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Reference material for transmission electron microscope calibration

Urheber*innen

Filippov,  M. N.
External Organizations;

Gavrilenko,  V. P.
External Organizations;

Kovalchuk,  M. V.
External Organizations;

Mityukhlyaev,  V. B.
External Organizations;

Ozerin,  Y. V.
External Organizations;

Rakov,  A. V.
External Organizations;

/persons/resource/roddatis

Roddatis,  Vladimir
0 Pre-GFZ, Departments, GFZ Publication Database, Deutsches GeoForschungsZentrum;

Todua,  P. A.
External Organizations;

Vasiliev,  A. L.
External Organizations;

Externe Ressourcen
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Volltexte (frei zugänglich)
Es sind keine frei zugänglichen Volltexte in GFZpublic verfügbar
Ergänzendes Material (frei zugänglich)
Es sind keine frei zugänglichen Ergänzenden Materialien verfügbar
Zitation

Filippov, M. N., Gavrilenko, V. P., Kovalchuk, M. V., Mityukhlyaev, V. B., Ozerin, Y. V., Rakov, A. V., Roddatis, V., Todua, P. A., Vasiliev, A. L. (2011): Reference material for transmission electron microscope calibration. - Measurement Science and Technology, 22, 9, 094014.
https://doi.org/10.1088/0957-0233/22/9/094014


Zitierlink: https://gfzpublic.gfz-potsdam.de/pubman/item/item_4693933
Zusammenfassung
We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30 000 times).